Indoor Air Quality (IAQ) Controlled in Special Space

AuraMat.® Chemical Filter

Special smells or odors can be easily told in a certain space, like a laboratory, warehouse, storage space, cleanroom, and quarantine room. These can cause server damage issues or air pollution problems. Considering the health and safety in working environments, IAQ control becomes more and more important.

IAQ inquiries are different and dependent on the application space. Like airborne molecular contamination (AMC) need to be well-controlled in cleanrooms/FOUP and anti-virus or anti-bacteria filter need to be installed at quarantine place.

AuraMat.® Chemical Filter is a regenerable filter that can be a perfect match to the air-conditioning system like MAU or FFU and effectively deal with AMC problems. The in-situ data from the cleanroom shows the concentration of micro-pollutants IPA and acetone were down to 1.4 ug/m3 and <0.1 ug/m3 from 20.8 ug/m3 and 13.8 ug/m3 respectively.

The advantages of AuraMat.® Chemical Filter is as follows:

  • Unique AHF is used
  • Cleanroom AMC control (MAU/FFU)
  • High tolerance of acid and alkali
  • Regenerable product, reducing waste at the source
  • Low pressure drop, no dusting/outgassing
  • Removal efficiency > 99%
  • Environmental friendly material
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